Title:
回路パターン転写装置及び方法
Document Type and Number:
Japanese Patent JP4674105
Kind Code:
B2
Inventors:
Motoichi Otsu
Tadashi Kawazoe
Tadashi Kawazoe
Application Number:
JP2005088861A
Publication Date:
April 20, 2011
Filing Date:
March 25, 2005
Export Citation:
Assignee:
Japan Science and Technology Agency
International Classes:
H01L21/027; G03F7/20
Domestic Patent References:
| JP2005260178A | ||||
| JP8020072A | ||||
| JP11204405A | ||||
| JP2004235574A | ||||
| JP2003007599A | ||||
| JP6137847A | ||||
| JP11317346A |
Attorney, Agent or Firm:
Nobuyuki Hayashi
Yasuhiko
Yasuhiko