Title:
CLEAN BENCH
Document Type and Number:
Japanese Patent JP2002321174
Kind Code:
A
Abstract:
To provide a clean bench according to class IIA, IIB1, IIB2 and IIB3 of JACA standard which is excellent in productivity and suitable for cost reduction.
In a clean bench, an air supply/exhaust unit 21 satisfying JACA standard and a standardized work room unit 1 are provided with a structure jointly connectable by using a connection structure in which a screw or welding is employed. In a connection part 3 of the both units, the space between the air supply/exhaust unit 21 including a work space and the air supply/exhaust unit 21 selectably configured is made negative pressure area to a space around the clean unit 1.
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Inventors:
ICHIKI SHINGO
ONO KEIICHI
ONO KEIICHI
Application Number:
JP2002004835A
Publication Date:
November 05, 2002
Filing Date:
April 12, 1993
Export Citation:
Assignee:
HITACHI LTD
International Classes:
B25H1/20; B01L1/00; F24F7/06; (IPC1-7): B25H1/20; B01L1/00; F24F7/06
Attorney, Agent or Firm:
Yoshihiko Izumi
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