Title:
CLEAN BOOTH
Document Type and Number:
Japanese Patent JP2019100594
Kind Code:
A
Abstract:
To provide a clean booth capable of preventing shortage of design volume of air in the clean booth, and maintaining a clean state in a work booth.SOLUTION: In a clean booth 10B, a supply amount of air supplied from a fan filter unit 14 (air supply means) is adjusted correspondingly to a return amount of air return means so that airflow flowing from an outside air supply port 28 toward a first port 13 and from the first port 13 toward a second port 40 in a front-back direction (one direction) occurs in a work booth 12 by cleaned air (outside air) supplied from the outside air supply port 28 to the work booth 12; and air in the work booth 12 flows out from the first port 13 without flowing the air back into the work booth 12 from the first port 13.SELECTED DRAWING: Figure 8
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Inventors:
TADA MITSUTERU
HASEGAWA MASAKAZU
MATSUO ERIKO
FURUKAWA YU
HASEGAWA MASAKAZU
MATSUO ERIKO
FURUKAWA YU
Application Number:
JP2017230076A
Publication Date:
June 24, 2019
Filing Date:
November 30, 2017
Export Citation:
Assignee:
DAI DAN CO LTD
International Classes:
F24F7/06; B01L1/00; E04B1/343; E04H5/02
Domestic Patent References:
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Foreign References:
| US20040166795A1 | 2004-08-26 |
Attorney, Agent or Firm:
Yoshitaka Kobayashi