Title:
クリーンカバー
Document Type and Number:
Japanese Patent JP4598255
Kind Code:
B2
Inventors:
Norio Maruyama
Application Number:
JP2000307831A
Publication Date:
December 15, 2010
Filing Date:
October 06, 2000
Export Citation:
Assignee:
Olympus Endo Technology America Inc.
International Classes:
G01N21/84; H01L21/66; B01L1/00; G01N21/956; G02B21/00
Domestic Patent References:
| JP10308426A | ||||
| JP62501731A |
Attorney, Agent or Firm:
Sadao Muramatsu
Satoshi Kono
Tetsuya Kazama
Satoshi Kono
Tetsuya Kazama