Title:
CLEAN MAINTAINING DEVICE FOR ISOLATOR
Document Type and Number:
Japanese Patent JP3683744
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a highly reliable clean maintaining device for an isolator to suppress the occurrence of leakage through the joint, such as a glass window system, of the isolator against various kinds of difficulties.
SOLUTION: The internal part of an isolator device 1a is brought into a positive pressure against an external part, and a negative pressure air suction passage 13 brought into a negative pressure against the internal part and external part of the isolator device is installed at the inner peripheral edge of the joint of a glass window 4. Air passing through the inner peripheral edge of the joint is sucked through a negative pressure air suction passage 13. In this constitution, air passing the inner peripheral edge of the joint by the positive pressure of the internal part of the isolator device 1a and air passing the outer peripheral edge from an external part are recovered by a negative pressure air suction passage 16. This constitution suppresses leakage through an internal part and prevents inflow of contaminated air from an external part, and improves shielding ability.
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Inventors:
Koji Kawasaki
Miyamoto Minoru
Hiroshi Eshiro
Toshinaga Toda
Mitsuo Shenno
Daisuke Tsunoda
Nobuo Ishiyama
Shinichi Higashiguchi
Mitsushi Narita
Miyamoto Minoru
Hiroshi Eshiro
Toshinaga Toda
Mitsuo Shenno
Daisuke Tsunoda
Nobuo Ishiyama
Shinichi Higashiguchi
Mitsushi Narita
Application Number:
JP15802399A
Publication Date:
August 17, 2005
Filing Date:
June 04, 1999
Export Citation:
Assignee:
Airex Co., Ltd.
International Classes:
H01L21/02; B08B15/02; F24F7/06; (IPC1-7): F24F7/06; H01L21/02
Domestic Patent References:
| JP3007837A | ||||
| JP2107384A | ||||
| JP5083640U | ||||
| JP4134414U |
Attorney, Agent or Firm:
Kitao Matsuura