Title:
クリーンルーム装置および空気循環ユニット
Document Type and Number:
Japanese Patent JP6909850
Kind Code:
B2
Abstract:
To provide a non-laminar flow type clean room apparatus capable of securing the cleanliness of an air conditioning region with a small number of ventilation while being a relatively simple facility.SOLUTION: A clean room apparatus comprises air circulation units 30 that are disposed in a clean room 10 and circulate air in the clean room 10. The air circulation unit 30 is provided with an intake opening 31 for sucking air in the clean room 10 at a position inside the clean room 10 and above an air conditioning region 11, and a plurality of air supply ports 32 that are disposed in the front face of the air circulation unit 30 and in distribution in a region up to a height facing the air conditioning region 11 and supply air laterally toward the air conditioning region 11. In the inside of the air circulation unit 30, there are provided a cooler 35, a high-performance filter 36, and a fan 37 that sucks air in the clean room 10 from the air intake opening 31, makes the air pass through the cooler 35 and the high-performance filter 36 and sends the air toward the air supply ports 32.SELECTED DRAWING: Figure 1
Inventors:
Yuzo Tanaka
Matsuoka Shin
Hirohide Kumagai
Sumita Sumitomo
Takaya Eto
Matsuoka Shin
Hirohide Kumagai
Sumita Sumitomo
Takaya Eto
Application Number:
JP2019229676A
Publication Date:
July 28, 2021
Filing Date:
December 19, 2019
Export Citation:
Assignee:
Takasago Thermal Engineering Co., Ltd.
International Classes:
F24F7/06; B01D46/00; B01L1/04; F24F1/0063; F24F1/0073; F24F13/06; F24F13/08; F24F13/20; F24F13/28; F24F13/30
Domestic Patent References:
| JP2000291989A | ||||
| JP2011085351A | ||||
| JP5361140B2 | ||||
| JP62038533U |
Attorney, Agent or Firm:
Koji Hagiwara
Tetsuo Kanamoto
Tetsuo Kanamoto