Title:
Clean room structure
Document Type and Number:
Japanese Patent JP6329195
Kind Code:
B2
Inventors:
Kazuo Kawashima
Application Number:
JP2016056234A
Publication Date:
May 23, 2018
Filing Date:
March 18, 2016
Export Citation:
Assignee:
Daikin Industries, Ltd.
Daikin Applied Systems Co., Ltd.
Daikin Applied Systems Co., Ltd.
International Classes:
B66B9/00; E04H5/02; H01L21/02
Domestic Patent References:
| JP10194633A | ||||
| JP2001098857A | ||||
| JP10132346A | ||||
| JP2013018559A | ||||
| JP2013163555A |
Attorney, Agent or Firm:
Maeda patent office
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