To provide a clean room easy to set and remove and requiring less cost of a main body or less cost for the setting and removal.
The clean room comprises a first floor 9, and first curved bodies 1a, 1b, 1c, 1d and 1d provided so as to cover at least a part of the first floor 9 and form a room R with the first floor 9. The first curved bodies include a first wall (at least one of 1b, 1c, 1d, and 1e) and an air passage 11. The first wall is formed by supplying a gas into a first double-membrane structure, and connected to the upper side of the first floor 9. The air passage 11 is provided within the first double-membrane structure and supplies first air having a cleanliness in a predetermined range to the room R. The first curved bodies have an outlet port 7 discharging the first air supplied to the room R as second air. The first curved bodies are self-supported on the first floor 9 by the first wall.
YAMAMURA MICHIO
HARADA SUSUMU
KONDO MITSUGI
YAMAMURA MICHIO
MHI ENVIRONMENT ENG CO LTD
RYONETSU KOGYO KK
| JPH0397933U | 1991-10-09 | |||
| JPH10121785A | 1998-05-12 | |||
| JPH02183749A | 1990-07-18 | |||
| JP2001074286A | 2001-03-23 | |||
| JP2000050744A | 2000-02-22 | |||
| JPH029740A | 1990-01-12 |
Keisaku Nakao
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