Title:
クリーンルーム
Document Type and Number:
Japanese Patent JP4273812
Kind Code:
B2
Inventors:
Teruo Minami
Rysuke Gotoda
Junta Hirata
Rysuke Gotoda
Junta Hirata
Application Number:
JP2003100294A
Publication Date:
June 03, 2009
Filing Date:
April 03, 2003
Export Citation:
Assignee:
Hitachi Plant Technology Co., Ltd.
International Classes:
F24F7/06; F24F9/00
Domestic Patent References:
| JP11023031A | ||||
| JP8193735A | ||||
| JP2002022227A |