CLEAN SPACE SYSTEM - EBARA CORP

Title:

CLEAN SPACE SYSTEM

Document Type and Number:

Japanese Patent JPH07272992

Kind Code:

A

Abstract:

PURPOSE: To provide a space cleaning system in which the state of a space to be cleaned can be monitored at all times to keep it in an appropriate state, the safety of its atmosphere against human body be secured, its maintenance be automated, and the contamination against specific molecules be reduced even in an atmosphere using air.

CONSTITUTION: The title system is equipped with detecting means 6 and 7 for detecting in a space such a substance that is harmful or useful for a processing substrate in the space among gases constituting the space to be cleaned, or a liquid or solid substance containing therein, a control means 10 for optimizing the detection quantity according to the detected quantity, and a means 13 for removing the harmful substances from the space or adding useful substances.

Inventors:

MATSUMURA MASAO
SHINOZUKA SHUHEI
TAKEUCHI NORIYUKI
KONDO FUMIO

Application Number:

JP8562494A

Publication Date:

October 20, 1995

Filing Date:

March 31, 1994

Export Citation:

Click for automatic bibliography generation Help

Assignee:

EBARA CORP

International Classes:

G02F1/13; B01D46/00; B01D53/30; B01D53/34; B08B15/02; F24F7/00; H01L21/02; (IPC1-7): H01L21/02; B01D46/00; B01D53/30; B01D53/34; B08B15/02; F24F7/00; G02F1/13

Attorney, Agent or Firm:

Isamu Watanabe (1 person outside)

Previous Patent: vehicle

Next Patent: Video data processing program, video data processing method, information processing apparatus, and i...