To provide a cleaner low in running cost and excellent in maintainability for exhaust gas generated in a board manufacturing device having a photo process.
This cleaner for exhaust gas generated in the board manufacturing device having a photo process is equipped with an exhaust gas inlet, a combustion means, and an exhaust gas outlet, and as the combustion means, a regenerative combustion means is used. Moreover, this is equipped with a pressure detection means which detects the pressure at inlet of the exhaust gas, an exhaust means which sucks out cleaned air from the exhaust gas outlet, and a control means, and the control means controls the exhaust means, based on the pressure detected with the pressure detection means thereby lessening the influence on the quality of a product. Moreover, this is equipped with a condensation means for raising the concentration of specified components within exhaust gas on the prestage of the combustion means. Moreover, this stabilizes the cleaning percentage of the regenerative combustion means by being equipped with a temperature adjusting means which adjusts the temperature of the exhaust gas lying within or flowing into the condensation means into a specified value.
HAYASHI KAZUYUKI
NAKAGAWA AKIO
MATSUSHITA ELECTRIC IND CO LTD
| JPH08139085A | 1996-05-31 | |||
| JPS5515657A | 1980-02-02 | |||
| JP2001012717A | 2001-01-19 | |||
| JPH1144416A | 1999-02-16 |
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