Title:
シリコンウェハ用洗浄剤
Document Type and Number:
Japanese Patent JP5482192
Kind Code:
B2
Inventors:
Kumon Soichi
Saito Maki
Takashi Saio
Hidetoshi Nanai
Yoshinori Akamatsu
Saito Maki
Takashi Saio
Hidetoshi Nanai
Yoshinori Akamatsu
Application Number:
JP2009293916A
Publication Date:
April 23, 2014
Filing Date:
December 25, 2009
Export Citation:
Assignee:
Central Glass Co., Ltd.
International Classes:
H01L21/304; C11D7/28; C11D7/50; C11D17/00; H01L21/027
Domestic Patent References:
| JP2007134690A | ||||
| JP2000019744A | ||||
| JP7273083A |
Attorney, Agent or Firm:
Makoto Koide