Title:
CLEANING APPARATUS UTILIZING ATMOSPHERIC-PRESSURE PLASMA
Document Type and Number:
Japanese Patent JP2006159009
Kind Code:
A
Abstract:
To provide a cleaning apparatus utilizing atmospheric-pressure plasma which can reduce the consumption of the gas for plasma generation and enhance the cleaning effect on the conditions of cost reduction and flexibility of the apparatus.
The apparatus has a spraying device 12 which is capable of spraying at a flow rate higher than that of the sent plasma flow and sprays a spray gas identical with or different from the gas for plasma generation, near the outlet of an atmospheric-pressure plasma generation chamber 10K having an inlet E feeding a gas for plasma generation to between opposing electrodes P1 and P2 and an outlet D sending generated plasma.
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Inventors:
ANDO YOSHIAKI
Application Number:
JP2004350692A
Publication Date:
June 22, 2006
Filing Date:
December 03, 2004
Export Citation:
Assignee:
ATOMU GIKEN KK
International Classes:
B08B7/00; H01L21/304
Attorney, Agent or Firm:
Toshiro Ochi