Title:
CLEANING APPARATUS
Document Type and Number:
Japanese Patent JP3895919
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a cleaning apparatus low in cost.
SOLUTION: An electrode 12 is disposed on a bottom wall 11L of a chamber 11 so as to form a micro clearance 13 at the bottom wall section. An Ar gas bomb 14 and a mixture gas bomb 15 are connected to the chamber through a reducing valve 16, 17, a flow regulation valve 18 and an on/off valve 19. An oil rotary pump and a vacuum gauge 21 are connected to the chamber. A sample holder 22 on which a sample 23 is set at the end is disposed in the chamber. An AC power source 25 capable of applying alternating voltage or a DC power source 26 capable of applying direct current voltage is disposed between the electrode 12 and a chamber main body 11M as a power source for cleaning the sample. A DC power source 27, 28 is disposed as a power source for cleaning the sample holder so that voltage can be applied between the chamber 11 and the sample holder 22.
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Inventors:
Okutomi Shoji
Masahiro Kawasaki
Hasegawa Ken
Masahiro Kawasaki
Hasegawa Ken
Application Number:
JP2000356023A
Publication Date:
March 22, 2007
Filing Date:
November 22, 2000
Export Citation:
Assignee:
JEOL Ltd.
JEOL Engineering Co., Ltd.
JEOL Engineering Co., Ltd.
International Classes:
G01N1/34; G01N1/28; G01N1/32; H01J37/20; (IPC1-7): G01N1/34; G01N1/28; G01N1/32; H01J37/20
Domestic Patent References:
| JP56012541A | ||||
| JP51023067A | ||||
| JP55075656U | ||||
| JP52109443U | ||||
| JP51110962A | ||||
| JP3040732U |