PURPOSE: To uniformize the impact force of a cleaning liquid against a supporting face within a jetting area of the cleaning liquid while widening the jetting area of the cleaning liquid and to improve the cleaning effect of an object to be cleaned.
CONSTITUTION: A cleaning apparatus has a supporting face 5a to support an object to be cleaned and is provided with a moving body 5 which is made movable horizontally and nozzles 11, 26 to jet a cleaning liquid to the object to be cleaner, The nozzles 11, 26 are installed in a vertical shaft 9 which are set rectangularily to the supporting face 5a and made possible to square-rotate in the way the nozzles can move at least within the movement track of the object to be cleaned while keeping a constant distance from the supporting face 5a. While the jetting area of the cleaning liquid to the square rotation of the vertical shaft 9 is widened, the jetting impact of the cleaning liquid against the supporting face within the jetting area is made even and cleaning effect of the object to be cleaned is improved.
KANETSUKI ISAO