Title:
CLEANING DEVICE AND CLEANING METHOD
Document Type and Number:
Japanese Patent JP2018153726
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a cleaning device and a cleaning method which can improve cleaning efficiency of a cleaned object such as a glass substrate by easily sterilizing and eliminating bacteria cells, especially a biofilm, in a system.SOLUTION: A cleaning device 9 includes: a downstream side nozzle 11 which is arranged at a downstream side of a conveyance direction of a cleaned object and jets primary cleaning water R1 to the cleaned object; a tank 3 which stores primary cleaning drainage R1' as drainage of the primary cleaning water R1 jetted from the downstream side nozzle 11; and an upstream side nozzle 21 which is arranged at an upstream side of the conveyance direction of the cleaned object and jets secondary cleaning water R2 supplied from the tank 3 to the cleaned object. The tank 3 includes alkali supply means which supplies an alkali agent or alkali aqueous solution into the tank 3; and ozone supply means which supplies ozone gas or ozone water into the tank 3. An operation mode of the alkali supply means and an operation mode of the ozone supply means can be switched.SELECTED DRAWING: Figure 1
Inventors:
SASAKI YUYA
YOKOI IKUNORI
YOKOI IKUNORI
Application Number:
JP2017050220A
Publication Date:
October 04, 2018
Filing Date:
March 15, 2017
Export Citation:
Assignee:
KURITA WATER IND LTD
International Classes:
B08B3/08; B08B3/02; G02F1/13; H01L21/304
Attorney, Agent or Firm:
Yuji Hayakawa
Keisuke Murasame
Keisuke Murasame