To relate to a cleaning device of providing an object to be washed in a washing tank filled with a cleaning fluid to clean the object to be washed, the washing tank, and a cleaning method, and to prevent a reattachment of foreign materials when the foreign materials are discharged from the cleaning fluid, and the object to be cleaned is recovered from the washing tank maintaining a cleaning level of the cleaning fluid.
The device includes a control means 5 and a discharging means 3, the control means 5 forming a predetermined flow to the cleaning fluid in the washing tank 1 when the object to be cleaned is provided in the washing tank 1 filled with the cleaning fluid to clean the object to be cleaned with the cleaning fluid to remove the foreign materials from the surface of the object to be cleaned, and the discharging means 3 being arranged on the channel of the predetermined flow of the cleaning fluid and discharging the cleaning fluid. The cleaning fluid is discharged outside the washing tank by the discharging means 3.
YANAGIDA YOSHIAKI
SUDO KOJI
KOBAYASHI HIDESUKE
SHIBANO TOSHIHARU
FUJITSU AUTOMATION
Jun Tsuruta
Kurachi Yasuyuki
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