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Title:
CLEANING DEVICE
Document Type and Number:
Japanese Patent JP2017087700
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a cleaning device which cleans a large mask plate and prevents deterioration of detergency without causing enlargement.SOLUTION: A cleaning device according to the invention includes: nozzles which jet a cleaning fluid to a mask plate; nozzle pipelines in which the nozzles are installed; and automatic valves which are respectively installed at the nozzle pipelines and enable individual control of the opening and closing.SELECTED DRAWING: Figure 1

Inventors:
YAMAZAKI YASUHISA
Application Number:
JP2015225012A
Publication Date:
May 25, 2017
Filing Date:
November 17, 2015
Export Citation:
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Assignee:
OKI COMMUNICATION SYSTEMS CO LTD
International Classes:
B41F35/00; B05B1/14; B05B1/30; B08B3/02; B41F15/12
Domestic Patent References:
JPH1071705A1998-03-17
JP2004230865A2004-08-19
JP2012170850A2012-09-10
JPH0650100A1994-02-22
JP2013099705A2013-05-23
Foreign References:
US5566697A1996-10-22
Attorney, Agent or Firm:
Patent Business Corporation Kisa Patent Trademark Office



 
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