To carry out prompt selection of decompression and pressurization in a cleaning and drying method that is suitable for characteristics of various chemicals such as, for example, an IPA solvent, a hydrocarbon solvent, an HFE solvent and the like.
A cleaning and drying apparatus includes: a drying head 3 that is detachably mounted by a carrying arm which is not illustrated in a figure on the upper part of a vapor cleaning tank 2 for carrying out vapor cleaning of a cleaning object 13 by storing a vapor cleaning agent 5 in the vapor cleaning tank 2; a decompression mechanism 18 which is formed so that the capacity of an inner space 15 of the drying head 3 is smaller than that of the inner space of the vapor cleaning tank 2 and which adjusts the pressure of the inner space of the drying head 3; and a hot air mechanism 16 for supplying hot air to the inner space 15 of the drying head 3.
| JP2000153243A | 2000-06-06 | |||
| JP2010240606A | 2010-10-28 | |||
| JP2006334504A | 2006-12-14 | |||
| JPH02273587A | 1990-11-08 | |||
| JP2006292261A | 2006-10-26 | |||
| JPH03146685A | 1991-06-21 | |||
| JPH0737850A | 1995-02-07 |
| WO2011024402A1 | 2011-03-03 |
Takaaki Yasumura
Takeshi Oshio