Title:
洗浄装置、および洗浄方法
Document Type and Number:
Japanese Patent JP7063896
Kind Code:
B2
Abstract:
A method of cleaning an inner wall surface (502) of a bell jar (500), by causing nozzles (112, 122) to discharge a cleaning liquid which contains abrasive particles, includes the steps of: (a) causing the nozzles (112, 122) to discharge the cleaning liquid at a discharge pressure at which erosion of the nozzles (112, 122), due to the cleaning liquid, occurs by not more than 500 µm / hour; and (b) adjusting a distance between the inner wall surface (502) and the nozzles (112, 122) so that an impingement pressure, at which the cleaning liquid impinges on the inner wall surface (502), secures a pressure at which dirt on the inner wall surface (502) can be removed.
Inventors:
▲高▼藤 創
Makoto Fukue
Sannohe Belles-lettre
Makoto Fukue
Sannohe Belles-lettre
Application Number:
JP2019523431A
Publication Date:
May 09, 2022
Filing Date:
May 22, 2018
Export Citation:
Assignee:
Tokuyama Corporation
International Classes:
C01B33/035; B08B9/093; C23C16/44; H01L21/205
Domestic Patent References:
| JP201739617A | ||||
| JP2010275183A | ||||
| JP2000297342A | ||||
| JP2004356299A | ||||
| JP2009164435A | ||||
| JP2006225189A |
Foreign References:
| WO2012063432A1 |
Attorney, Agent or Firm:
Patent business corporation HARAKENZO WORLD PATENT & TRADEMARK
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