Title:
Cleaning equipment and a processing device
Document Type and Number:
Japanese Patent JP6121265
Kind Code:
B2
Inventors:
Kazuya Esumi
Application Number:
JP2013135513A
Publication Date:
April 26, 2017
Filing Date:
June 27, 2013
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/304; B08B3/02; H01L21/301
Domestic Patent References:
| JP201215347A | ||||
| JP299175A | ||||
| JP118211A | ||||
| JP2003133259A | ||||
| JP2009297851A | ||||
| JP2000189728A | ||||
| JP1041270A | ||||
| JP5851964A |
Attorney, Agent or Firm:
Hiroaki Sakai