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Title:
CLEANING EQUIPMENT
Document Type and Number:
Japanese Patent JP2004058035
Kind Code:
A
Abstract:

To provide a precise and small cleaning equipment by which even semiconductor parts also can be cleaned at low cost in a simple implement.

The small and inexpensive cleaning equipment comprises a cleaning rotating drum 1 having multiple cleaning tanks, a draining rotating drum 2, a washing liquid removing rotating drum 3 having an air blowing function, a rinsing rotating drum 4 having multiple rinsing tanks, and a drying rotating drum 5 having an air blowing function. A spiral feeder fin being commonly brought into contact with each of the drums is formed and is rotated along a common shaft. One or more of matters to be cleaned are put in succession in synchronization or in a close-to-synchronization to perform successively multiple tank cleaning, washing liquid removal, multiple tank rinsing, and air blowing drying, while the cleaned matters are being transported in the tanks.


Inventors:
KOKUBU HITOSHI
Application Number:
JP2002252006A
Publication Date:
February 26, 2004
Filing Date:
July 29, 2002
Export Citation:
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Assignee:
KOKUBU HITOSHI
International Classes:
B08B3/06; F26B11/06; (IPC1-7): B08B3/06; F26B11/06



 
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