Title:
洗浄装置
Document Type and Number:
Japanese Patent JP6471322
Kind Code:
B2
Inventors:
Natsuko Aota
Yuji Takahashi
Takahiro Yagisawa
Teruo Kuroiwa
Haruharu Katakura
Aida Hideo
Ishida Yumune
Shuta Utsumi
Yuji Takahashi
Takahiro Yagisawa
Teruo Kuroiwa
Haruharu Katakura
Aida Hideo
Ishida Yumune
Shuta Utsumi
Application Number:
JP2015554802A
Publication Date:
February 20, 2019
Filing Date:
December 18, 2014
Export Citation:
Assignee:
Adamant Namiki Precision Jewel Co., Ltd.
International Classes:
H01L21/304; F26B5/08; H01L21/683
Domestic Patent References:
| JP2012054414A | ||||
| JP2013145860A | ||||
| JP62131433U | ||||
| JP11219929A |