Title:
接触子先端のクリーニング部材
Document Type and Number:
Japanese Patent JP4152040
Kind Code:
B2
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Inventors:
Masatoshi Hinai
Naomasa Nara
山▲崎▼ 亨
Naotoshi Hosoya
Naomasa Nara
山▲崎▼ 亨
Naotoshi Hosoya
Application Number:
JP14189199A
Publication Date:
September 17, 2008
Filing Date:
May 21, 1999
Export Citation:
Assignee:
Nippon Micronics Co., Ltd.
Japan Micro Coating Co., Ltd.
Japan Micro Coating Co., Ltd.
International Classes:
B24D3/00; H01L21/66; B24D15/04; G01R1/06; G01R31/28
Domestic Patent References:
| JP57168868A | ||||
| JP57022834U | ||||
| JP10300777A | ||||
| JP11097496A | ||||
| JP2000114326A | ||||
| JP7026772U | ||||
| JP11238768A |
Attorney, Agent or Firm:
Nobuyuki Matsunaga