Title:
研削装置におけるチャックテーブルの洗浄方法および洗浄装置
Document Type and Number:
Japanese Patent JP4387557
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a chuck table cleaning method and a chuck table cleaning device which does not become large in scale, can be manufactured inexpensively, does not require large-scale remodeling even when the device is attached to a grinding device provided with no chuck table cleaning device afterward. SOLUTION: In the chuck table cleaning method, the adsorption surface of the ceramic adsorption pad of a work carrying-out means is brought into contact with the ceramic placing surface of a chuck table having the placing surface for holding a work by suction, and the adsorption surface of the adsorption pad is slid relatively to the placing surface of the chuck table in a state where the adsorption surface is in contact with the placing surface while cleaning water is supplied to the contacting section.
Inventors:
Hiroshi Sasayama
Application Number:
JP2000143601A
Publication Date:
December 16, 2009
Filing Date:
May 16, 2000
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B08B1/04; B08B3/04; H01L21/304; B08B7/04; B24B55/06
Domestic Patent References:
| JP11226521A | ||||
| JP8148449A | ||||
| JP10296627A | ||||
| JP4206544A | ||||
| JP2000106390A | ||||
| JP7223152A |
Attorney, Agent or Firm:
Naozumi Ono