To provide a manufacturing apparatus and a manufacturing method of carbonated water capable of simply and rapidly manufacturing high-concentration carbonated water, and a method for cleaning electronic material members by the carbonated water manufactured by this manufacturing apparatus.
Raw water is supplied to a liquid phase chamber 1b of a deaeration membrane module 1 through a raw water pipe 11. A vacuum pump 3 is operated to decompress the inside of a gas phase chamber 1c. A dissolved gas dissolved in the raw water permeates through a gas permeation membrane 1a and is exhausted out of the system through the gas phase chamber and an exhaust pipe 13. Deaerated water flows into a liquid phase chamber 2b of a carbon dioxide dissolution membrane module 2 through a deaerated water pipe 12. Meanwhile, carbon dioxide is supplied from a carbon dioxide supplier 4 through a carbon dioxide pipe 15 to the gas phase chamber 1c. A prescribed amount of carbon dioxide permeates through a gas permeation membrane 2a and is dissolved in the deaerated water in the liquid phase chamber 2b. The deaerated water in which the carbon dioxide is dissolved flows out of a carbonated water pipe 14.
MORITA HIROSHI
KOMORI HIDEYUKI
| JP2007124559A | 2007-05-17 | |||
| JP2000042375A | 2000-02-15 | |||
| JP2005066443A | 2005-03-17 | |||
| JP2007123559A | 2007-05-17 | |||
| JP2003088738A | 2003-03-25 | |||
| JPH11221532A | 1999-08-17 |
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