Title:
金属膜作成装置のクリーニング方法
Document Type and Number:
Japanese Patent JP4849463
Kind Code:
B2
Inventors:
Hitoshi Sakamoto
Yu Nagata
Yugo Tomita
Fvbarcek Milan
Yu Nagata
Yugo Tomita
Fvbarcek Milan
Application Number:
JP2006315246A
Publication Date:
January 11, 2012
Filing Date:
November 22, 2006
Export Citation:
Assignee:
Canon ANELVA Corporation
International Classes:
C23C16/44; C23C16/18; H01L21/285
Domestic Patent References:
| JP2003155568A | ||||
| JP2003155569A |
Attorney, Agent or Firm:
Iwata Today sentence
Sayori Seto
Sayori Seto