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Title:
基板処理装置のクリーニング方法,基板処理装置,プログラム,プログラムを記録した記録媒体
Document Type and Number:
Japanese Patent JP5059320
Kind Code:
B2
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Inventors:
Hiroshi Nakamura
Kiyohito Iijima
Application Number:
JP2005360822A
Publication Date:
October 24, 2012
Filing Date:
December 14, 2005
Export Citation:
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Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/3065; C23C16/44; H01L21/205
Domestic Patent References:
JP2005101539A
Attorney, Agent or Firm:
Hiroaki Oyama



 
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