CLEANING METHOD WHEN UPLIFTING ULTRAPURE WATER PRODUCTION SYSTEM

Title:

CLEANING METHOD WHEN UPLIFTING ULTRAPURE WATER PRODUCTION SYSTEM

Document Type and Number:

Japanese Patent JP2014000548

Kind Code:

A

Abstract:

To provide a cleaning method of an ultrapure water production system capable of shortening a cleaning trial operation time until produced-supplied ultrapure water reaches a desired water quality, when newly uplifting the ultrapure water production system and when re-uplifting after resting by a periodic inspection, by surely removing particulates.

The method is provided for uplifting and cleaning at least a part of the ultrapure water production system composed of an ultrapure water production device, a use point of ultrapure water and a piping system for connecting the ultrapure water production device and the use point. The cleaning method of the ultrapure water production system comprises a carbon dioxide melting water circulating process and a pushing-out process.

Inventors:

IIYAMA MASAMITSU
ABE TOSHIKAZU
KOGURE MASAHIKO
KUSANO TORU
MIYAGAWA KIYOKAZU

Application Number:

JP2012138734A

Publication Date:

January 09, 2014

Filing Date:

June 20, 2012

Export Citation:

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Assignee:

NOMURA MICRO SCIENCE KK

International Classes:

B08B9/027; B01D61/00; B01F1/00; B01F3/04; B01F5/06; B08B3/08; C02F1/00; C02F1/20

Domestic Patent References:

JP2004122020A	2004-04-22
JPH07195073A	1995-08-01
JP2011161418A	2011-08-25
JPH0811992A	1996-01-16
JP2008221144A	2008-09-25

Foreign References:

US20040040585A1

2004-03-04

Attorney, Agent or Firm:

Patent Business Corporation Sakura International Patent Office

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