Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
CLEANING PROCESS DEVICE
Document Type and Number:
Japanese Patent JPH10337543
Kind Code:
A
Abstract:

To enable the even cleaning of the surface of a work by rocking at least, either of a cleaning means or the work in a direction crossing a direction in which the work is conveyed.

A work 12 is conveyed into a cleaning chamber 11 with the help of a conveying roler 15. In addition, rotating roll brushes 16 are caused to shuttle back and forth in the longitudinal direction. An unclean area is occasionally developed in the wake of cleaning on the surface of the work 12, as long as the cleaning operation depends upon the roll brushes 16 which are driven to rotate, because of a gap to be generated in the filling of each of the roll brushes 16. However, the surface of the work 12 is thoroughly cleaned by the longitudinal shuttle motion of the roll brushes 16. That is, the filling of the roll brushes 16 slides over every inch of the surface of the work 12 to scrape a soil, which is, in turn, washed with a cleaning water from cleaning water jet nozzles 19. Thus it is possible to clean the surface of the work 12 efficiently and without leaving an unclean area untouched.


Inventors:
SAKASHITA KENJI
KANEKO KATSUNORI
Application Number:
JP15105097A
Publication Date:
December 22, 1998
Filing Date:
June 09, 1997
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
SHIBAURA ENG WORKS LTD
International Classes:
B08B3/02; H01L21/304; B08B1/04; (IPC1-7): B08B3/02; B08B1/04; H01L21/304
Attorney, Agent or Firm:
Takehiko Suzue (6 outside)