Title:
CLEANING PROCESS
Document Type and Number:
Japanese Patent JP2756381
Kind Code:
B2
Abstract:
PURPOSE: To carry out cleaning without leaving stain dispensing with a fleon- type solvent by carrying out a two-step degreasing step to degrease a material to be cleaned by a non-aqueous solution and an aqueous solvent, a finishing cleaning step, a rinsing step and a drying process using a plurality of highly pure water layers.
CONSTITUTION: A cleaning apparatus consists of four degreasing tanks 1-4 to clean a material to be cleaned with a non-aqueous liquid after processing step and two cleaning tanks 5-6 to clean out non-aqueous liquid. Further, there are installed a rinsing tank 7 to clean the material to be cleaned with general water, cleaning tanks 8-9 to carry out finishing cleaning of the material to be cleaned, rinsing tank 10-11 to clean the material to be cleaned with pure water, hot pure water tanks 12-13 to immerse the material to be cleaned in humidified superpure water, and a hot air zone 14 as a drying tank to dry the material to be cleaned. The hot pure water tank 13 is used as a pulling out tank in which the pure water is heated at about 70-80°C and the surface of the material to be cleaned is dried by pulling it up out of the hot pure water at about 3-8mm/sec.
Inventors:
NAKAJIMA IKUO
HOSAKA AKIHITO
IMAI CHIHIRO
NISHIGUCHI TOSHIMOTO
HOSAKA AKIHITO
IMAI CHIHIRO
NISHIGUCHI TOSHIMOTO
Application Number:
JP23793691A
Publication Date:
May 25, 1998
Filing Date:
September 18, 1991
Export Citation:
Assignee:
KYANON KK
International Classes:
B08B3/04; B08B3/08; C23G5/02; (IPC1-7): B08B3/08; C23G5/02
Domestic Patent References:
| JP3207875A | ||||
| JP4179228A | ||||
| JP1210092A | ||||
| JP1130771A | ||||
| JP5447365A | ||||
| JP5334366A | ||||
| JP52100756A | ||||
| JP5062133A | ||||
| JP4711970U | ||||
| JP6348597B2 | ||||
| JP6345475B2 | ||||
| JP6241080B2 | ||||
| JP466626B2 |
Attorney, Agent or Firm:
Marushima Giichi