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Title:
CLEANING SYSTEM OF DECONTAMINATED EQUIPMENT
Document Type and Number:
Japanese Patent JPS57146200
Kind Code:
A
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Inventors:
OOTSUKA FUMIO
NINOMIYA SUSUMU
Application Number:
JP3116581A
Publication Date:
September 09, 1982
Filing Date:
March 06, 1981
Export Citation:
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Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
G21F9/08; B08B3/00; B08B9/027; G21F9/00; G21F9/06; G21F9/28; (IPC1-7): B08B3/00; G21F9/06; G21F9/28



 
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