To provide a cleaning system that prevents a rapid density change of a washing fluid inside a cleaning chamber and that prevents a cleaning object after washing from being damaged.
In the cleaning system 10, a filter is washed by making a washing fluid flow from the first face to the second face of a filter stored in the cleaning chamber of a cleaning container 15. After the filter is washed, a controller 17 makes a first temperature control means, a second temperature control means and a flow rate control means perform their functions, thereby gradually lowering, with a nearly constant down gradient, the temperature of the washing fluid in the cleaning chamber. Simultaneously, by making a fluid pressure diminishing means perform its function, the density of the washing fluid inside the cleaning chamber is lowered with a nearly constant down gradient.
TAMURA KAZUYA
SUZUKI AKIRA
NAT INST OF ADVANCED IND SCIEN
| JP2004025029A | 2004-01-29 |