Title:
CLEANING WORK MODULE AND CLEAN TUNNEL
Document Type and Number:
Japanese Patent JP2002195636
Kind Code:
A
Abstract:
To enhance cleanliness in a clean space easily at a low cost using a simple structure.
Air supply surface of an outlet surface filter 16e is curved substantially radially, at least along the widthwise direction orthogonal to the depthwise direction, so that downward flow clean air 11 being supplied from an air supply section 16c is supplied while being spread substantially radially, at least in the widthwise direction. Since the downward flow clean air 11 being supplied from the air supply surface of the outlet surface filter 16e can be supplied properly at least over the entire width of a clean space 12, a uniform downward flow can be obtained.
Inventors:
KANBARA HIROBUMI
SUGIYAMA YOSHIYUKI
ISHINO TOMOAKI
SUGIYAMA YOSHIYUKI
ISHINO TOMOAKI
Application Number:
JP2000396763A
Publication Date:
July 10, 2002
Filing Date:
December 27, 2000
Export Citation:
Assignee:
SANKYO SEIKI SEISAKUSHO KK
TOYO NETSU KOGYO KK
TOYO NETSU KOGYO KK
International Classes:
F24F7/06; F24F13/06; (IPC1-7): F24F13/06; F24F7/06
Domestic Patent References:
| JP2000296481A | 2000-10-24 | |||
| JPH0525241U | 1993-04-02 | |||
| JPH09150027A | 1997-06-10 | |||
| JP2000158930A | 2000-06-13 | |||
| JPH01266462A | 1989-10-24 | |||
| JPH03241262A | 1991-10-28 | |||
| JPH08296890A | 1996-11-12 | |||
| JP2002195620A | 2002-07-10 | |||
| JPH0361930U | 1991-06-18 | |||
| JPS61197427U | 1986-12-09 | |||
| JPS61213540A | 1986-09-22 | |||
| JPS5393652A | 1978-08-16 | |||
| JPH0646240U | 1994-06-24 |
Attorney, Agent or Firm:
Takahide Goto