Title:
A Clio adsorption panel, a manufacturing method for the same, and a vacuum device using it
Document Type and Number:
Japanese Patent JP6021276
Kind Code:
B2
Inventors:
Murase Takanori
Main island
Hirohiko Tanaka
Mori Saki Tomohiro
Masahiro Mita
Main island
Hirohiko Tanaka
Mori Saki Tomohiro
Masahiro Mita
Application Number:
JP2014209086A
Publication Date:
November 09, 2016
Filing Date:
October 10, 2014
Export Citation:
Assignee:
National Institute for Natural Sciences
Kyodo International Co., Ltd.
Kyodo International Co., Ltd.
International Classes:
F04B37/08; C23C14/06; F04B37/16
Domestic Patent References:
| JP60247074A | ||||
| JP61291785A | ||||
| JP60249678A |
Attorney, Agent or Firm:
Suzue International Patent Office