Title:
閉ループの超低温再循環ガス冷却装置
Document Type and Number:
Japanese Patent JP4487233
Kind Code:
B2
Abstract:
Disclosed is an ultra-low temperature, dual-compressor ( 114,144 ), recirculating gas chilling system that includes a closed-loop mixed-refrigerant primary refrigeration system ( 110 ) in combination with a closed-loop gas secondary refrigeration loop ( 112 ). The ultra-low temperature, dual-compressor ( 114,144 ), recirculating gas chilling system disclosed is capable of providing continuous long term chilled gas and fast cooling of a high or ambient temperature object ( 158 ), such as a chuck used in processing semiconductor wafers or any such device. The gas chilling system is characterized by three modes of operation: a normal cooling mode, a bakeout mode, and a post-bake cooling mode.
Inventors:
Apalao, Tamiri Savi. Vi. Earl.
Pocherniev, Oleg
Flynn, Kevin Pee.
Hall, pole
Rochimburg, Roger
Boyarski, Mikhail
Pocherniev, Oleg
Flynn, Kevin Pee.
Hall, pole
Rochimburg, Roger
Boyarski, Mikhail
Application Number:
JP2002591740A
Publication Date:
June 23, 2010
Filing Date:
February 25, 2002
Export Citation:
Assignee:
Brooks Automation Incorporated
International Classes:
F25D16/00; F25D17/06; F25B1/00; F25B5/04; F25B7/00; F25B9/00
Domestic Patent References:
| JP2000284832A | ||||
| JP2000154950A | ||||
| JP7103587A |
Foreign References:
| WO1999058905A2 |
Attorney, Agent or Firm:
Akio Miyazaki
Ishibashi Masayuki
Masaaki Ogata
Ishibashi Masayuki
Masaaki Ogata