PURPOSE: To provide a cluster device which is provided with positioning devices in a chamber and can shorten not only the carrying time, but also positioning time of objects to be treated.

CONSTITUTION: This device is provided with a chamber 1 to the walls of which treatment devices 4a, 4b, 4c, 4d, and 4e are respectively connected, carrying arm 2 which can carry objects to be treated into the devices 4a, 4b, 4c, 4d, and 4e and is incorporated in the chamber 1, and a plurality of positioning devices 3a, 3b, 3c, 3d, and 3e which can position the objects to be treated to the placing positions of the devices 4a, 4b, 4c, 4d, and 4e and is incorporated in the chamber 1.