Title:
CLUSTER TOOL TYPE PAPER SHEET PROCESSOR HAVING ULTRASONIC FLOATING CARRYING MECHANISM
Document Type and Number:
Japanese Patent JP3122061
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a cluster tool type paper sheet processor, having an ultrasonic floating carrying mechanism with superior sealability whose structure can be simplified and miniaturized in which particles being dust will not be generated by removing a rotating part or a contact or sliding part, and the degree of vacuum in a load lock chamber will not be deteriorated.
SOLUTION: An ultrasonic floating carrying mechanism, constituted of a receiving position deciding piece 702a, an ultrasonic oscillator 704a, and an ultrasonic oscillating means for oscillating the ultrasonic oscillator is provided in a load lock chamber 73, and the frequencies and phase of high-frequency oscillation currents impressed to the ultrasonic oscillating means are controlled in a state such that the load lock chamber 73 is filled with N2 gas. Thus, ultrasonic oscillation constituted of progressive waves is generated in the ultrasonic oscillator 704a, and an object W to be processed placed on the receiving position deciding piece is floatingly-carried to a processor 4 or a center robot 1 on the ultrasonic oscillation constituted of the progressive waves.
Inventors:
Tadayasu Ohsawa
Yoshiki Hashimoto
Kazuki Kubo
Yoshiki Hashimoto
Kazuki Kubo
Application Number:
JP21017597A
Publication Date:
January 09, 2001
Filing Date:
July 22, 1997
Export Citation:
Assignee:
Kaijo Co., Ltd.
International Classes:
B65G27/32; B65G54/00; C23C16/44; C23C16/54; H01L21/304; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; B65G54/00; C23C16/44; C23C16/54; H01L21/304
Domestic Patent References:
| JP574822A | ||||
| JP7242317A | ||||
| JP367817A | ||||
| JP7137824A | ||||
| JP7137822A |
Attorney, Agent or Firm:
Minoru Yakushi (1 person outside)