Title:
粗微動機構
Document Type and Number:
Japanese Patent JP4926758
Kind Code:
B2
Abstract:
In operation of a rough and fine movement mechanism ( 1 ) of a linear drive type, a fine movement mechanism ( 3 ), on which an objective workpiece to be positioned ( 8 ) is mounted, is transferred toward a target point at a high speed by a rough movement mechanism ( 2 ) and roughly positioned around the target point. Subsequently, the objective workpiece ( 8 ) is transferred in a narrow stroke range by the fine movement mechanism ( 3 ) and accurately positioned at the target point. The objective workpiece ( 8 ) is transferred with a high acceleration by the rough movement mechanism ( 2 ) under a condition where the fine movement mechanism ( 3 ) is mechanically connected to the rough movement mechanism ( 2 ) by a braking mechanism 9 . As a result, when the rough movement mechanism ( 2 ) is accelerated, no load acts on the fine movement mechanism ( 3 ) or such a load can be decreased. Consequently, a rough and fine movement mechanism, which enables both high-speed positioning by the rough movement mechanism and high-accuracy positioning by the fine movement mechanism consistently, can be realized.
Inventors:
Naoki Kanayama
Application Number:
JP2007047695A
Publication Date:
May 09, 2012
Filing Date:
February 27, 2007
Export Citation:
Assignee:
Harmonic Drive Systems Inc.
International Classes:
F16H35/00; F16H25/20
Domestic Patent References:
| JP5071518U | ||||
| JP3272353A | ||||
| JP1274943A | ||||
| JP63140159A | ||||
| JP9324843A | ||||
| JP7328893A |
Attorney, Agent or Firm:
Shiro Yokozawa