Title:
COATER AND COATING METHOD
Document Type and Number:
Japanese Patent JP2011045833
Kind Code:
A
Abstract:
To provide a coater capable of inhibiting the residence of air bubbles in a liquid fed to a discharge part of a nozzle head etc. from a liquid storage part of a tank etc., and also, eliminating a phenomenon in which the discharge of the liquld from the discharge part fails on account of the air bubble.
The coater 100 includes the liquid storage part 108 in which the liquid 120 is stored, a vapor-liquid separator 130 which deaerates the liquid 120 sent from the liquid storage part 108, and a nozzle head 106 with nozzle holes 168 which discharge the liquid 120 which is deaerated by the vapor-liquid separator 130 and fed from the vapor-liquid separator 130.
Inventors:
SHIMODA SATORU
Application Number:
JP2009196288A
Publication Date:
March 10, 2011
Filing Date:
August 27, 2009
Export Citation:
Assignee:
CASIO COMPUTER CO LTD
International Classes:
B05C5/00; B05C11/10; B05D3/00; H01L51/50; H05B33/10
Attorney, Agent or Firm:
Hiroshi Arafune
Yoshio Arafune
Yoshio Arafune