Title:
塗布装置および塗布制御装置
Document Type and Number:
Japanese Patent JP5626783
Kind Code:
B2
Inventors:
三好 ▲清▼人
羽角 信義
羽角 信義
Application Number:
JP2010208440A
Publication Date:
November 19, 2014
Filing Date:
September 16, 2010
Export Citation:
Assignee:
住友重機械工業株式会社
International Classes:
B05C11/10
Attorney, Agent or Firm:
Sakaki Morishita
Takehiro Murata
Tomoyoshi Miki
Kimio Tomidokoro
Takehiro Murata
Tomoyoshi Miki
Kimio Tomidokoro