Title:
塗布装置及び塗布方法
Document Type and Number:
Japanese Patent JP5148248
Kind Code:
B2
Abstract:
The invention discloses a coating device and a coating method for inhibiting the long-term of a coating device whole operation period even the time is consumed when a substrate is fixed on a worktable. The coating method of the coating device comprises a substrate loading working procedure for loading the substrate on the worktable surface, an initial film forming working procedure for forming the initial film on the substrate of the worktable surface and a coating film forming working procedure for spraying coating liquid from the a spray unit and forming coating films on substrate. The substrate loading working procedure comprises an adsorption working procedure for adsorbing substrates on surface of the worktable. The adsorption working procedure comprises an initial adsorption workingprocedure for adsorbing a substrate initial film forming region including a coating the initial position and a main adsorption working procedure for adsorbing a substrate coating film forming region besides the initial film forming region, and the initial film forming working procedure is started after the initial adsorption working procedure is over and before the main adsorption working procedure is over.
Inventors:
Toshihiro Mori
Kagaya Manabu
Kagaya Manabu
Application Number:
JP2007291111A
Publication Date:
February 20, 2013
Filing Date:
November 08, 2007
Export Citation:
Assignee:
Toray Engineering Co., Ltd.
International Classes:
B05C13/00; B05D3/00
Domestic Patent References:
| JP11125811A | ||||
| JP2006289162A | ||||
| JP2006068592A | ||||
| JP10086085A | ||||
| JP1165166U |