Title:
塗布装置及び塗布方法
Document Type and Number:
Japanese Patent JP6440510
Kind Code:
B2
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Inventors:
Satoshi Tomoe
Kenichi Shimatani
Shigeru Higashino
Fukushima Yugo
Kenichi Shimatani
Shigeru Higashino
Fukushima Yugo
Application Number:
JP2015014993A
Publication Date:
December 19, 2018
Filing Date:
January 29, 2015
Export Citation:
Assignee:
Toray Engineering Co., Ltd.
International Classes:
H05K3/10; B05C5/00; B05C11/10; B05D1/26; B05D3/00
Domestic Patent References:
| JP2009239155A | ||||
| JP2006507935A | ||||
| JP2013076929A | ||||
| JP2011194278A |
Attorney, Agent or Firm:
Kazumasa Okumura