Title:
塗布装置、および塗布方法
Document Type and Number:
Japanese Patent JP6846941
Kind Code:
B2
Abstract:
Disclosed is a coating device which draws a pattern of a functional liquid on a substrate. The coating device includes: a substrate holding unit which holds the substrate; a droplet discharging unit which discharges a droplet of the functional liquid on the substrate held by the substrate holding unit; a moving unit which relatively moves the substrate holding unit and the droplet discharging unit in a main scanning direction and a sub scanning direction on a base; a mass measuring unit including a cup which receives the droplet discharged by the droplet discharging unit and a mass measuring device which measures a mass of the functional liquid accumulated in the cup; and a liquid drain unit which drains the functional liquid accumulated in the cup.
Inventors:
Yosuke Mine
Kazuhito Miyazaki
Kazuhito Miyazaki
Application Number:
JP2017017053A
Publication Date:
March 24, 2021
Filing Date:
February 01, 2017
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
B05C11/10; B05C5/00; B05D1/26; B05D3/00; B41J2/165; B41J2/17; G01G19/52; H01L51/50; H05B33/10
Domestic Patent References:
| JP2009045546A | ||||
| JP2007136450A | ||||
| JP2009022915A | ||||
| JP2004177262A |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito