PURPOSE: To improve the speed of forming films on the inside and outside surfaces of a pipe with a coating device by activating a reaction gas by high-frequency discharge or glow discharge and irradiating laser light to the activated gas.
CONSTITUTION: A metallic pipe 1 is attached to a holding part 4 and after the pipe is hermetically closed, the inside of the pipe 1 is evacuated to expel the atmospheric air therefrom by a vacuum pump 11. While the reaction gas is supplied into a gas introducing pipe 8, the high-frequency discharge or glow discharge is generated between the pipe 8 and the inside surface of the pipe 1 by a discharge generator 14. The reaction gas flowing out of a nozzle 9 of the pipe 8 is activated by such discharge. The laser light 21 is irradiated from a window 12 to the activated reaction gas in parallel with the inside surface of the pipe 1 to induce the thermal cracking and synthesizing reaction of the reactive gas, thus sticking the resultant reaction product to the inside surface of the pipe 1. The pipe 1 is rotated by driving rollers 16 during this time to stick the resultant reaction product over the entire inside surface. The speed of forming the resultant reaction product is thereby increased and the density of the product sticking to the pipe is increased.
NAKADA KIYOKAZU
ONO MORIAKI
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