To obtain a uniform coating film thickness regardless of the temp. change of a coating solution and to save the coating solution and installation space.

A liquid vessel is provided in a nozzle member 19 and a property that the coating film thickness is changed with the temp. change of the coating solution in the liquid vessel is compensated by a property that the coating film thickness is changed with the change of coating speed by the movement of the nozzle member 19 to a substrate 2 by a linear motor 11. Then, the uniform coating film thickness is constantly obtained regardless of the temp. change of the coating solution. Further since the substrate 2 is vertically mounted without horizontally supporting the substrate 2 like the conventional rotary coating system, the installation space is reduced and the coating solution is applied on the surface to be coated of the substrate 2 while moving the nozzle member 19 along the vertically mounted substrate 2 by the linear motor 11 in comparison with the conventional rotary coating system by applying the coating solution while tearing away to the surroundings.