Title:
塗布膜形成方法及び塗布膜形成装置
Document Type and Number:
Japanese Patent JP3754316
Kind Code:
B2
Inventors:
Tomohide Minami
Shinichi Sugimoto
Takahiro Kitano
Atsushi Okura
Kurishima Kei Satoshi
Shinichi Sugimoto
Takahiro Kitano
Atsushi Okura
Kurishima Kei Satoshi
Application Number:
JP2001117191A
Publication Date:
March 08, 2006
Filing Date:
April 16, 2001
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
B05C11/08; G03F7/16; B05D1/40; H01L21/027
Domestic Patent References:
| JP9320950A | ||||
| JP6326014A | ||||
| JP10321512A | ||||
| JP8299878A | ||||
| JP10022210A | ||||
| JP1204421A | ||||
| JP63069563A | ||||
| JP60500105A |
Attorney, Agent or Firm:
Toshio Inoue
Mizuno Hiromi
Mizuno Hiromi