Title:
COATING FORMING APPARATUS AND COATING FORMING METHOD
Document Type and Number:
Japanese Patent JP2002263548
Kind Code:
A
Abstract:
To provide a coating forming apparatus capable of shortening the cycle time of a coating forming line without requiring a robot or the like required to be capable of performing complicated movements.
The coating forming apparatus comprises a coating apparatus, a rotating apparatus, a first vacuum drying apparatus, a second vacuum drying apparatus, a washing apparatus and a heating apparatus arranged in this order from the upstream side to the downstream side along a transportation line of a substrate.
Inventors:
YAMAGUCHI KAZUNOBU
KUMAZAWA HIROTSUGU
KUMAZAWA HIROTSUGU
Application Number:
JP2001068017A
Publication Date:
September 17, 2002
Filing Date:
March 12, 2001
Export Citation:
Assignee:
TOKYO OHKA KOGYO CO LTD
International Classes:
G03F7/16; B05C9/00; B05C9/12; B05D3/00; F26B9/06; H01L21/027; H01L21/20; H01L21/31; H01L21/677; H01L21/68; (IPC1-7): B05C9/12; B05D3/00; F26B9/06; G03F7/16; H01L21/027; H01L21/31; H01L21/68
Attorney, Agent or Firm:
Yu Koyama
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