Title:
塗布ヘッドのクリーニング装置とクリーニング方法
Document Type and Number:
Japanese Patent JP6634600
Kind Code:
B2
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Inventors:
Masahiro Muro
Hidehiro Yoshida
Shuhei Nakatani
Kentaro Kumazawa
Hidehiro Yoshida
Shuhei Nakatani
Kentaro Kumazawa
Application Number:
JP2016079343A
Publication Date:
January 22, 2020
Filing Date:
April 12, 2016
Export Citation:
Assignee:
Panasonic IP Management Co., Ltd.
International Classes:
B41J2/165
Domestic Patent References:
| JP2012091419A | ||||
| JP2013091266A | ||||
| JP2014522762A | ||||
| JP2005178108A | ||||
| JP2016000516A |
Foreign References:
| US20120098886 |
Attorney, Agent or Firm:
Kenji Kamada
Koichi Nomura
Koichi Nomura