Title:
COATING LIQUID COATING APPARATUS AND COATING LIQUID COATING METHOD
Document Type and Number:
Japanese Patent JP2014171978
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a coating liquid coating apparatus and a coating liquid coating method capable of uniformly coating a coating liquid on a surface of a substrate with a small discharge quantity of the coating liquid.SOLUTION: A coating liquid coating apparatus according to an embodiment of the present invention includes a support table 1 for mounting a substrate on it, coating liquid discharging means 4 for discharging a coating liquid on a surface of a substrate 2. The coating liquid discharging means has a coating liquid supplying line 10 for supplying the coating liquid to a nozzle 8 and a valve controlling part 5. The coating liquid supplying line includes a supply pipe 6, a first valve V1, and a second valve V2. The first valve has a first state in which supply of the coating liquid is cut off and a second state in which the coating liquid is supplied to the nozzle, which are switched by a signal from the valve controlling part. The second valve has a third state in which flow rate of the coating liquid is decreased and a fourth state in which the flow rate of the coating liquid is maintained, which are switched by a signal from the valve controlling part independently of the first valve.
Inventors:
YONEDA SAKAHITO
Application Number:
JP2013047310A
Publication Date:
September 22, 2014
Filing Date:
March 08, 2013
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
B05C11/08; B05C11/10; B05D1/40; H01L21/027
Domestic Patent References:
| JP2001230198A | 2001-08-24 | |||
| JPH11114474A | 1999-04-27 | |||
| JP2005044872A | 2005-02-17 | |||
| JP2008096297A | 2008-04-24 |
Attorney, Agent or Firm:
Masahiko Hiugaji